JPH01130565U - - Google Patents
Info
- Publication number
- JPH01130565U JPH01130565U JP2608688U JP2608688U JPH01130565U JP H01130565 U JPH01130565 U JP H01130565U JP 2608688 U JP2608688 U JP 2608688U JP 2608688 U JP2608688 U JP 2608688U JP H01130565 U JPH01130565 U JP H01130565U
- Authority
- JP
- Japan
- Prior art keywords
- gate insulating
- insulating film
- amorphous silicon
- gate
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 12
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2608688U JPH01130565U (en]) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2608688U JPH01130565U (en]) | 1988-02-29 | 1988-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130565U true JPH01130565U (en]) | 1989-09-05 |
Family
ID=31247391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2608688U Pending JPH01130565U (en]) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130565U (en]) |
-
1988
- 1988-02-29 JP JP2608688U patent/JPH01130565U/ja active Pending